Micro gas mass flowmeter_Производитель расходомеров-Shanghai Cixi Instrument Co. Ltd.

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CX-F3 Micro gas mass flowmeter

Mass Flow Controller(MFC)Used to accurately measure and control the mass flow of gas. They play an important role in scientific research and production in various fields such as semiconductors and integrated cir- cuit industries,special materials disciplines, chemical industry, and indu- strial, pharmaceutical, environmental protection, and vacuum lamps. Typical applications include: electronic process equipment such as dif- fusion,epitaxy,CVD,oxidation,plasma etching,sputtering,and ion impla- ntation ; and coating equipment, optical fiber smelting, microreaction devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other analytical instruments

Features

Wide measuring ranges	Micro	High precision
Low pressure drop	Small size	Fast response

Technical Data

Model Number: CX-F3	Accuracy: 0.5%
Working pressure: 3MPa	Material of base: 316L
Flow range: 1.5~150sIm	Glad hand:Φ3/Φ6/Φ10/1/8〞/1/4〞/3/8〞
Power: DC +15V/24V	Analog value: DC 0~5V/4~20mA

Used to accurately measure and control the mass flow of gas

The digital type is the left side style, with LCD display, instantaneous and total flow, pressure, temperature can be displayed at the same time and can be equipped with RS485/232, the MODBUS protocol analog type is the right side style, without digital display and no communication function

The range ratio of the flowmeter is 1:100, the valve control range of the controller is 1:50 the minimum can measure 2SCCM and the maximum can measure 3000SLM

The base material of the flow meter controller is S316L, and the material that contacts the gas is also SS316L. It can measure some weak corrosive gases. When measuring other strong corrosive gases and organic solvent gases, it should be declared when ordering.

The standard accuracy of gas mass flowmeters is 0.5%. 1.0% of reading, and the repeatability of 0.5% full scale accuracy is 0.2%. The accuracy of the controller is 1.0% (full scale accuracy)

The flow range of the miniature gas mass flow controller is the same as that of the flowmeter, the valve control range ratio is 50:1, and the proportional control valve accuracy is 1.0%.

Digital value RS485 MODBUS；Analog value DC 0~5V ，4~20mA

note: The mass flow meter and mass flow controller are usually calibrated with nitrogen (N2). The unit of mass flow is stipulated as: SCCM (Standard ml/min); SLM(Standard l/min) Standard state stipulates: temperature -----273.15K (0℃); Pressure -----101325 Pa(760mm Hg） F.S (Full Scale); Full-scale value